采用溶胶 凝胶金属氧化物半导体薄膜 ,作为表面等离子体激元共振效应的光化学传感器的传感介质。分析了金属Ag膜与传感薄膜的光学参数对传感器灵敏度的影响。通过在金属层与传感层之间优化设计中间层 ,进一步提高了传感器灵敏度。选择SnO2 薄膜及SiO2 薄膜作为传感层与中间层 ,对三种气体NH3、C2 H5 OH、C3H8进行气敏实验 ,结果表明结构优化的传感器具有更高的灵敏度。 Sol-gel metal oxide semiconductor thin films are used as sensing media for photochemical sensors of surface plasmon resonance. The influence of the optical parameters of the Ag film and the sensing film on the sensitivity of the sensor is analyzed. The sensor sensitivity is further improved by optimizing the design of the middle layer between the metal layer and the sensing layer. SnO2 thin films and SiO2 thin films were selected as the sensing layer and the intermediate layer. Gas sensing experiments were performed on the three gases NH3, C2 H5 OH and C3H8. The results show that the sensor with structural optimization has higher sensitivity.