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通过改变Ti靶弧电流,在自行改造的多弧离子镀膜机上制备了不同Ti含量的(Cr,Ti)N复合涂层。研究了不同Ti含量对涂层沉积速率、成分相结构、表面形貌及纳米硬度等性能的影响,对涂层的硬化机理进行了探讨。结果表明:随着Ti含量的增加,复合涂层的沉积速率提高,晶粒尺寸变小,粗糙度降低。涂层的择优取向从(111)晶面逐渐过渡到(220)晶面;其相结构由CrN类型结构转变为TiN和CrN并存的混合相结构,最后转变为TiN类型结构。Ti的加入可显著提高复合涂层的硬度,当Ti在金属元素中的原子数分数为0.62时,复合涂层纳米硬度最高,为35GPa。与CrN涂层相比,CrTiN复合涂层具有较低的滑动摩擦因数和较高的抗滑动摩擦磨损性能。
By varying the Ti target arc current, (Cr, Ti) N composite coatings with different Ti content were prepared on a self-made multi-arc ion plating machine. The effects of different Ti content on the deposition rate, compositional phase structure, surface morphology and nano-hardness of the coating were studied. The hardening mechanism of the coating was also discussed. The results show that with the increase of Ti content, the deposition rate of the composite coating increases, the grain size decreases and the roughness decreases. The preferred orientation of the coating gradually changes from the (111) plane to the (220) plane. The phase structure changes from a CrN-type structure to a coexisting mixed phase structure of TiN and CrN, and finally to a TiN-type structure. The addition of Ti can significantly improve the hardness of the composite coating. When the atomic number of Ti in the metal element is 0.62, the nano-hardness of the composite coating is the highest, 35GPa. Compared with the CrN coating, CrTiN composite coating has a lower coefficient of sliding friction and higher anti-sliding friction and wear properties.