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采用新改进的阴极弧金属等离子体源 ,对 9Cr18轴承钢进行了金属等离子体浸没离子注入 (PIII)处理。首先将Ti,Mo和W离子分别注入到 9Cr18钢的表面 ,然后再对其进行N等离子体浸没离子注入 ,从而在 9Cr18钢表面形成了一层超硬耐磨的改性层。对PIII处理后的试样进行了显微硬度和磨损特性测试 ,结果表明 ,经PIII处理后的试样表面的显微硬度和耐磨性显著提高 ,而其中经Ti和Mo注入再进行N离子注入的试样效果更为明显。与仅进行N离子注入的试样相比 ,金属加N离子注入的试样表面耐磨性提高幅度更大 ,表明金属PIII在改善 9Cr18钢表面性能方面具有广阔的应用前景。XPS分析结果表明 ,PIII处理后试样表面形成了超硬的氮化物相 ,它们在改善材料表面特性中起到了重要的作用。
A newly improved cathode arc metal plasma source was used to treat the 9Cr18 bearing steel with metal plasma immersion ion implantation (PIII). Firstly, Ti, Mo and W ions were respectively implanted into the surface of 9Cr18 steel, and then N plasma immersion ion implantation was performed to form a layer of super-hard and wear-resisting modified layer on the surface of 9Cr18 steel. The microstructure and wear characteristics of PIII-treated samples were tested. The results showed that the microhardness and wear resistance of PIII-treated samples were significantly increased, while the implantation of Ti and Mo followed by N ions Inject the sample effect is more obvious. Compared with the sample with only N ion implantation, the wear resistance of the sample doped with N + ions increases more greatly, indicating that the metal PIII has broad application prospects in improving the surface properties of 9Cr18 steel. The results of XPS analysis showed that the superhard nitride phase formed on the surface of PIII treated samples, which played an important role in improving the surface properties of the materials.