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在较高精度面形测量的光学方法中,很多测量范围都受到光波波长的限制。简述了一种利用光栅投影系统来增强其垂直方向测量范围的新方法。通过投影仪来产生能够消除表面低频变化影响的变形光栅,测量该栅线经过被检面的变形图像,通过处理得到表面的高频信息,然后将高频和低频信息叠加得到表面轮廓图。通过实验模型的建立证明,该方法具有测量精度范围宽,能实时地得到表面轮廓图。
In the optical methods of surface measurement with higher precision, many measurement ranges are limited by the wavelength of light. A new method of using raster projection system to enhance its vertical measuring range is briefly described. Through the projector, a deformable grating that can eliminate the influence of the low-frequency change on the surface is generated, the deformed image of the grating is measured and the surface high-frequency information is obtained through processing, and then the high-frequency and low-frequency information are superposed to obtain the surface contour. The establishment of the experimental model proves that this method has a wide range of measurement accuracy and can obtain the surface profile in real time.