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本文讨论了研究半导体缺陷深能级瞬态谱中遇到的多指数分解问题，并使用共轭梯度计算法对瞬态谱进行数值Laplace逆变换处理来实现多指数瞬态的分解．结果表明，此方法具有较高的分辨率，而且存储和计算量较小，适用于进行常规的深能级瞬态精细结构测量．
In this paper, the problem of multi-exponential decomposition encountered in the deep-level transient spectra of semiconductor defects is discussed, and the conjugate gradient method is used to transform the transient spectra to deal with the multi-exponential transient decomposition. The results show that this method has higher resolution, less storage and calculation, and is suitable for the conventional deep level transient fine structure measurement.