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在谐振梁能量收集器中PZT膜材料的制备起着至关重要的作用,复合结构的锆钛酸铅(PZT)厚膜采用溶胶-凝胶方法旋涂在硅基的Au/Cr/SiO2/Si结构衬底的制备方法,主要因为溶胶-凝胶制备方法简单,成本低适合于集成制作.改进PZT组分和和0-3混合法及复合结构的Au/Cr/SiO2/Si衬底,使制备的PZT厚膜避免了厚度引起的裂痕,膜厚最厚可以达到4μm.同时采用Au/Ti顶层电极有利于PZT的d31工作模式.系列实验给出了厚膜的介电、铁电和压电特性,复合结构压电梁的能量收集可达0.74μW,3.93 DC电压直流输出.实验表明硅基PZT膜厚可以很好的承担谐振梁能量收集器材料.
The preparation of PZT film material plays an important role in the resonant beam energy harvester. The PZT thick film with composite structure is spin-coated on silicon-based Au / Cr / SiO2 / The preparation method of the Si structure substrate is mainly because the preparation method of the sol-gel is simple and the cost is low and is suitable for the integrated fabrication. The PZT component, the Au / Cr / SiO2 / Si substrate mixed with 0-3 and the composite structure are improved, The prepared PZT thick film can avoid thickness-induced cracks, and the thickness can be up to 4μm thick.At the same time, the Au / Ti top electrode is favorable to the d31 working mode of PZT.The series of experiments show the dielectric, ferroelectric and Piezoelectricity and composite beam can collect energy up to 0.74μW and DC voltage of 3.93 DC.The experimental results show that the thickness of silicon-based PZT film can well support the resonant beam energy harvester material.