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介绍了一种适用于砷化镓数字电路的Bp—SAG工艺。在该工艺基础上研制的GaAs数字二分频电路,最大工作频率达到2.25GHz,等效门延迟为92ps。
A Bp-SAG process for gallium arsenide digital circuits is introduced. Developed on the basis of the process of GaAs digital divide-by-2 circuit, the maximum operating frequency of 2.25GHz, the equivalent gate delay of 92ps.