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利用射频 /直流磁控溅射法 ,制备了 31 6L不锈钢 /Al2 O3 陶瓷复合薄膜 ,研究了 31 6L不锈钢 /Al2 O3 陶瓷复合膜的组织形貌 ,测试了薄膜的显微硬度和耐磨性。结果表明 :直流磁控溅射 31 6L不锈钢薄膜呈柱状晶结构 ,主要有 Fe- Cr和γ- Fe相构成 ,在 Fe- Cr( 1 1 0 )晶面出现明显的择优取向 ;由于射频溅射 Al2 O3 陶瓷的掺合 ,使 31 6L不锈钢 /Al2 O3 陶瓷复合薄膜柱状晶细化 ,并出现二次柱状晶 ,在 Fe- Cr( 2 1 1 )晶面出现明显的择优取向 ,31 6L不锈钢膜硬度明显高于 31 6L块体 ,掺合了 Al2 O3 的金属 /陶瓷复合薄膜耐磨性有显著的提高。
A 31 6L stainless steel / Al 2 O 3 ceramic composite film was prepared by RF / DC magnetron sputtering. The microstructure and morphology of the 31 6L stainless steel / Al 2 O 3 ceramic composite film were investigated. The microhardness and wear resistance of the composite film were tested. The results show that the DC magnetron sputtering 316L stainless steel thin film has a columnar crystal structure, mainly composed of Fe-Cr and γ-Fe phases, and has obvious preferential orientation on the Fe-Cr (1 1 0) crystal plane. Due to RF sputtering Al 2 O 3 ceramics, the columnar grains of 31 6L stainless steel / Al 2 O 3 ceramic composite films were thinned and the secondary columnar grains appeared. The obvious preferential orientation appeared on the Fe-Cr (2 1 1) The hardness is obviously higher than that of 31 6L block, and the wear resistance of metal / ceramic composite films doped with Al 2 O 3 is obviously improved.