论文部分内容阅读
在本世纪八十年代后期,在日本、美国等工业发达国家兴起了低压下人工合成金刚石膜的热潮,并已有沉积金刚石薄膜的车刀,金刚石膜做振动膜的扬声器等工业产品出售。据美国某公司估计,由于金刚石薄膜还可以制造耐高温的微波振荡元件、计算机芯片、大功率激光窗口等,其世界市场的发展很快,到1995年将达到7.65亿美元。低压下合成金刚石薄膜的主要方法有高频等离子体化学气相沉积法、微波等离子体化学沉积法、直流等
In the late 1980s, industrialized countries such as Japan and the United States developed the boom of synthetic diamond films under low pressure. There have been industrial products such as diamond-deposited film turning tools and diamond diaphragm speakers. According to a U.S. company’s estimation, the global market for diamond films will grow rapidly to reach 765 million U.S. dollars in 1995, since the diamond films can also manufacture microwave oscillating elements, computer chips and high-power laser windows with high temperature resistance. Low pressure synthesis of diamond films are the main methods of high-frequency plasma chemical vapor deposition, microwave plasma chemical deposition, DC, etc.