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用射频溅射法制备了Ｆｅ７３ ．５Ｃｕ１Ｎｂ３Ｓｉ１３．５Ｂ９ 单层膜和Ｃｕ 或Ａｇ 作为中间层的三明治膜．溅态膜为非晶态结构．磁畴观察结果表明，单层膜在３８０ ℃退火后，呈现均匀磁化的纳米晶结构，该样品软磁特性最佳，其巨磁阻抗效应最大，在１３ ＭＨｚ ，最大磁阻抗比纵向为１８ ％ ，横向为１４ ％ ．溅态三明治膜具有较大的巨磁阻抗效应，在１３ ＭＨｚ ，Ｃｕ 夹层三明治膜的最大磁阻抗比纵向为３２ ％ ，横向为１１ ％ ，Ａｇ 夹层三明治膜的最大磁阻抗比纵向为４７ ％ ，横向为５７ ％ ．Ｃｕ夹层三明治膜经２５０ ℃退火后，在低频下表现为巨磁电感效应，在１００ ｋＨｚ，最大磁电感比为１７３３ ％ ．
Fe73 was prepared by RF sputtering. 5Cu1Nb3Si13.5B9 monolayer film and Cu or Ag as an intermediate layer. Spraying film is amorphous structure. The results of magnetic domain observation show that the single-layer film exhibits a uniform magnetized nanocrystalline structure after being annealed at 380 ° C. The sample has the best soft magnetic property and has the largest GMR effect. At 13 MHz, the maximum magnetic resistance is 18% , Horizontal 14%. The maximum GMR of Cu sandwiched sandwich membrane was 32% in the longitudinal direction and 11% in the horizontal direction at 13 MHz. The maximum magnetic resistance of the sandwich sandwich membrane was 47% 57% horizontally. The Cu sandwich sandwich films annealed at 250 ℃ exhibited giant magneto-inductive effect at low frequency, and the maximum magneto-inductive ratio was 1733% at 100 kHz.