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本文区分了三种扫描电镜．即普通电子枪扫描电镜．场发射电子枪扫描电镜以及场发射枪低象差物镜扫描电镜；指出．了后两种扫描电镜对高分辨扫描电子显微学的重要意义。详细评述了高分辨扫描电子显微学中的电子范围的概念，二次电子的发射特性．二次电子象中所包含的信息以及高分辨率下试样表面导电膜的喷涂的要求和方法。
This article distinguishes three scanning electron microscopy. Namely ordinary electron gun scanning electron microscope. Field emission electron gun scanning electron microscopy and field emission gun low aberration objective scanning electron microscopy; The latter two scanning electron microscopy for high resolution scanning electron microscopy of great significance. The concept of electron range in high resolution scanning electron microscopy and the emission characteristics of secondary electrons are reviewed in detail. Information contained in the secondary electron image, and the requirements and methods of spraying the conductive film on the surface of the sample under high resolution.