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在不锈钢材料表面，用射频磁控溅射沉积Ｃ—ＳｉＣ，利用ＸＲＤ、ＸＰＳ对电子束处理前后的Ｃ—ＳｉＣ涂层进行了微观分析．
On the surface of stainless steel, C-SiC was deposited by RF magnetron sputtering. The microstructure of C-SiC coating before and after EB treatment was analyzed by XRD and XPS.