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针对微纳流控芯片等器件的对准装配问题,分析了具体操作要求,建立了一套包含显微光学观测单元、机械进给调整和器件吸取-放置等的微装配系统,采用暗场照明观测微纳结构,高精度移动平台精确调整基片与盖片之间的角度与位置,利用真空吸附的方法抓取和释放。采用该系统成功地制造了多种可用的微纳流控芯片,以玻璃微纳流控芯片的对准装配为示范开展了实验研究,对准结果表明,该系统能够完成宽53μm,深18μm的微通道与宽3μm,深50~260nm的纳通道的对准连接任务。采用本系统进行芯片对准装配的方法具有仪器成本低、使用灵活和易于互换的优点,适合实验室及小批量生产使用。
Aiming at the problem of alignment and assembly of devices such as micro-nano flow control chips, the specific operation requirements are analyzed. A micro-assembly system including microscopic optical observation unit, mechanical feed adjustment and device pick-and-place are established. Dark field illumination Observing the micro / nano structure, the precise moving platform accurately adjusts the angle and the position between the substrate and the cover sheet, and grasps and releases by the vacuum adsorption method. The system has been successfully used to manufacture a variety of micro-nano flow control chips, the glass micro-nano-flow control chip alignment assembly as an example to conduct an experimental study, the alignment results show that the system can be completed wide 53μm, 18μm deep Micro-channel and wide 3μm, deep 50 ~ 260nm nanochannel alignment connection task. The system for chip alignment assembly method has the advantages of low instrument cost, flexible use and easy interchangeability, and is suitable for laboratory and small batch production.