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利用数字化的干涉技术对受温度、压力、湍流等具有大畸变的动态变化场波前实现高速高精度实时化的检测是非常需要的。介绍了一种基于空间位相调制的径向剪切干涉系统,配以具有连续与脉冲光于一体的半导体泵浦固体激光器,结合一种新颖的高速图像采集同步控制系统,可以对各种连续及动态变化场波前实现共路干涉、无需参考面的瞬态、高精度的检测,波前图像采集频率在像素512×512时可达到1000帧/s以上。系统的波前重构理论都经过了计算机仿真验证,仿真精度达1/1000λ以上。与ZYGO数字波面干涉仪相比,检测结果RMS优于1/15λ,并有很好的重复性;目前该系统已用于惯性约束聚变(ICF)等系统的脉冲波前检测,并且在航空航天、流体、流场的各类物理量的检测领域具有广泛的应用前景。
The use of digital interference technology for the temperature, pressure, turbulence and other large distortion of the dynamic field wave front to achieve high-speed high-precision real-time detection is very necessary. A radial shear interference system based on spatial phase modulation is introduced. Combined with a pumped solid-state laser with continuous and pulsed light, a novel high-speed image acquisition synchronization control system is presented to simulate various continuous and Common-channel interference is realized by the wave field of dynamic change field without the transient and high-precision detection of the reference surface. The wavefront image acquisition frequency can reach more than 1000 frames / s at the pixel 512 × 512. The wavefront reconstruction theory of the system has been verified by computer simulation, the simulation accuracy of 1 / 1000λ above. Compared with the ZYGO digital surface interferometer, the RMS of the detection results is better than 1 / 15λ and has good repeatability. At present, the system has been used for the pulse wavefront detection in systems such as inertial confinement fusion (ICF), and in the aerospace , Fluid, flow field of various types of physical detection of the field has a wide range of applications.