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采用多弧离子镀技术在高速钢基体上制备了TiN/TiAlN多层薄膜,用扫描电镜及能谱仪对膜层表面形貌和成分进行了观察与分析,结果表明:随钛靶电流的增大,小液滴的尺寸不仅增大,而且形状更不规则,而无液滴处的Al/Ti原子比呈递减规律;随基体偏压的降低,小液滴有减少的趋势,但这一趋势并不明显,而无液滴采集点的Al/Ti原子比也呈递减规律;基体偏压和钛靶电流对较大尺寸的液滴的影响不大。
TiN / TiAlN multi-layer thin films were prepared on high speed steel substrate by multi-arc ion plating technique. The surface topography and composition of the films were observed and analyzed by SEM and EDS. The results show that with the increase of Ti target current The size of the large and small droplets not only increases but also the shape is more irregular, while the atomic ratio of Al / Ti at the droplet does not decrease. With the decrease of the substrate bias, the size of the droplets decreases. However, The trend is not obvious, and the atomic ratio of Al / Ti without drop collection point also shows a decreasing rule. The effect of substrate bias and titanium target current on the droplet of larger size is not obvious.