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等离子体交叉场调制开关(简称PCMS管)采用外加磁场的设计,基于冷阴极潘宁放电原理产生等离子体。本文应用基于有限元法的多物理场仿真模拟软件Comsol 4.0对PCMS管器件模型进行二维建模;同时,建立了电子在磁场作用下的漂移扩散模型;分别对磁场大小以及磁场区域的变化进行了模拟计算,重点讨论磁场的引入对电子密度分布的影响,从而确定磁场的最佳设置。
Plasma cross-field modulation switch (referred to as PCMS tube) using an external magnetic field design, based on cold cathode Penning discharge principle of plasma. In this paper, the multi-physics simulation software Comsol 4.0 based on the finite element method is used to model the PCMS tube model. At the same time, the drift diffusion model of the electrons under the magnetic field is established. The changes of the magnetic field and the magnetic field are respectively carried out. The simulation calculation, focusing on the introduction of the magnetic field on the electronic density distribution, in order to determine the best magnetic field settings.