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针对传统方法抛光高功率激光实验中使用的长焦距列阵透镜单元遇到的检测困难、一致性差等问题,提出了采用环形抛光的新方法。对环形抛光系统的理论分析表明,抛光盘面形可以稳定在球面状态。利用这种特性,环形抛光法可以抛光小曲率球面。阐述了抛光盘面形的调节方法。利用0.69 m环形抛光机对口径45 mm、曲率半径57207 mm的列阵透镜单元进行了抛光,结果表明面形精度和一致性均优于平面摆动式抛光法。最后对环形抛光机可抛光的球面曲率半径范围进行了探讨,发现盘面尺寸越小球面抛光能力越强,直径0.8 m的盘面可抛光的曲率半径可低至10 m。
Aiming at the problems of difficult detection and poor consistency of the long focal length array lens unit used in the traditional method of polishing high power laser experiments, a new method of annular polishing is proposed. The theoretical analysis of the ring polishing system shows that the surface of the polishing disk can be stabilized in the spherical state. With this feature, the ring polish can polish a small curvature sphere. The method of adjusting the surface of the polishing disc is described. Polishing the array lens unit with the diameter of 45 mm and the radius of curvature of 57207 mm by a 0.69 m ring polisher, the results show that the surface shape accuracy and consistency are better than the plane wobble polishing method. Finally, the range of spherical radius of curvature of the ring polisher is discussed. The smaller the disc size is, the stronger the spherical polish ability is. The radius of curvature of polished disc with diameter of 0.8 m can be as low as 10 m.