论文部分内容阅读
基于光纤低相干干涉技术的测厚原理,提出了透镜中心厚度检测系统的结构设计;分析了影响检测仪器检测精度的主要因素,并分别从光路、电路设计及信号处理等方面,提出了提高检测系统检测精度的方法;同时将K-means聚类算法应用于多组干涉信号峰值识别和提取,有效提高了系统测量的重复精度。所设计的系统具有结构简单、测量速度快等特点,测量精度优于1μm。
Based on the principle of optical fiber low coherence interferometry thickness measurement, the structural design of the lens center thickness detection system is proposed. The main factors affecting the detection accuracy of the detection instrument are analyzed. And the methods of improving the detection, such as optical path, circuit design and signal processing, System detection accuracy method; K-means clustering algorithm is also applied to the peak identification and extraction of multiple sets of interference signals, which effectively improves the repeatability of the system measurement. The designed system has the characteristics of simple structure, fast measuring speed, the measuring accuracy is better than 1μm.