随着集成电路的不断发展,以微电子技术为代表的一系列集成电路在机电设备方面运用日益广泛。相比集成电路最初发明的时期,目前的集成电路设计制造工艺无论是在精确度方面还是集成度方面都已经有了相当大的提高。因此,对集成电路的设计与制造工艺进行研究,不仅具有现实意义,而且具有长远意义。 With the continuous development of integrated circuits, a series of integrated circuits represented by microelectronic technology have been widely used in electromechanical equipment. The current IC design and manufacturing processes have seen considerable improvements both in terms of accuracy and in integration, compared to the original invention of integrated circuits. Therefore, the research on IC design and manufacturing process not only has practical significance, but also has long-term significance.