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This paper presents a vacuum gripper (as an actuator of an intelligent micromanipulator) for micro objects (with a diameter of 100~300μm) assembly tasks.The gripper is composed of a vacuum unit and a control unit.The vacuum unit with a proportional valve and a pressure sensor,and the control unit with a PC+MCU two-layered control architecture are designed.The mechanical structure,workflow and major programs of the micro-gripper are presented.