论文部分内容阅读
A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10° at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.
A micro-electro-mechanical system (MEMS) silicon-based non-silicon mirror for a 2D optical switch is designed, fabricated and measured. The result shows that the mirror has good reflective performance. And driven by static electricity, it can rotate more than 10 ° at voltage less than 15 V. This kind of novel mirror will have good potential applications for MEMS optical switches.