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采用ISO推荐的方法测量了发光面为 1μm× 15 0 μm的阵列半导体激光器的光束半径、远场发散角、束腰位置、瑞利长度 ,并根据测量结果计算了光束传输因子 (M2 因子 )。以此为基础 ,研究了半导体激光器光束的快轴准直以及光纤耦合技术 ,采用微柱面透镜准直后 ,阵列半导体激光器快轴方向发散角可减小到 0 .48°。设计了光纤耦合光学系统 ,与 10 0 μm光纤耦合时的耦合效率为 71.0 % ,与 2 0 0 μm光纤耦合时的效率为 83.4%。
The beam radius, far-field divergence angle, beam waist position and Rayleigh length of the array semiconductor laser with 1 μm × 150 μm surface were measured by the ISO method. The beam propagation factor (M2 factor) was calculated according to the measurement results. Based on this, the fast axis collimation and fiber coupling technology of the semiconductor laser beam are studied. After the micro-cylindrical lens is collimated, the divergence angle of the fast axis of the array semiconductor laser can be reduced to 0.48 °. A fiber-coupled optical system was designed with a coupling efficiency of 71.0% for coupling with 100 μm fiber and 83.4% for coupling with 200 μm fiber.