高精度光刻投影物镜在工作过程中吸收激光能量产生热像差,在离轴照明模式(如偶极照明)下,热像散显著且随时间变化,传统的被动光学方法无法补偿此类像差。提出在折射式光刻投影物镜系统中使用主动光学的方法,通过力促动器作用在透镜上使镜片变形以补偿初阶热像散。采用有限元分析方法,分析了简化的折射平板在促动力作用下的变形特点和像差特性;用几何光学理论近似论证了该补偿方案的可行性,并且分析了促动器分布、促动力大小、促动器与平板接触区域尺寸以及支撑结构对平板变形的影响。结果表明,在优化的支撑结构下,主动平板可以较好地补偿系统初阶热像散和初阶四叶像差,为光刻系统热像差的补偿提供了一个思路。 High-precision lithography projection lens absorbs laser energy to generate thermal aberration during working, thermal astigmatism is significant and changes with time in off-axis illumination mode (such as dipole illumination), and traditional passive optical methods can not compensate for such images difference. Proposed the use of active optics in a refractive lithography projection objective system by acting on the lens by a force actuator to deform the lens to compensate for primary thermal astigmatism. The finite element analysis method is used to analyze the deformation and aberration characteristics of the simplified refracting plate under the action of the accelerating force. The feasibility of the compensating scheme is demonstrated by the geometrical optics theory. The distribution of the actuator, the magnitude of the actuating force , The size of the actuator-plate contact area, and the effect of the support structure on the plate deformation. The results show that under the optimized supporting structure, the active flat plate can compensate the initial thermal astigmatism and the initial four-leaf aberration well, which provides a train of thought for compensating the thermal aberration of the lithography system.