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介绍一种新颖的双针表面形貌测量系统 ,它将光学位移传感器和触针位移传感器巧妙地结合在一起 ,从而具有接触和非接触两种测量手段。与单一测量模式的表面形貌测量仪器相比 ,它的性能价格比更高 ,应用范围更广。该测量系统已投入实用 ,接触测量模式下其垂直测量范围和垂直分辨率分别是 1mm和 10nm ,非接触测量模式下分别是 5 0 0 μm和 3nm。实践证实 ,该系统使用灵活 ,可靠性高
A novel double-needle surface topography measurement system is introduced, which combines the optical displacement sensor and the stylus displacement sensor with cleverly combining two methods of contact and non-contact measurement. Compared with the single measurement mode surface morphology measuring instruments, it is more cost-effective and has a wider range of applications. The measurement system has been put into practical use. The vertical measurement range and vertical resolution in contact measurement mode are 1 mm and 10 nm respectively, and the non-contact measurement modes are 500 μm and 3 nm respectively. Practice has proved that the system is flexible and highly reliable