论文部分内容阅读
飞秒激光加工是一种冷加工技术,能克服热效应的影响,使加工材料的边缘非常整齐和精确,对高熔点和硬脆材料的微细加工具有显著优势。为制备一种由金属靶和金刚石构成的X射线源微结构阵列阳极,提出采用飞秒激光加工技术加工金刚石微结构阵列,通过实验研究了飞秒脉冲激光加工多晶金刚石材料的工艺参量,重点分析了激光聚焦物镜、激光脉冲能量、重复扫描次数对金刚石微结构形貌和尺寸的影响,得到了符合制作要求的加工参量,并依据加工参量制作出了槽宽为20μm,槽深达45μm的高质量多晶金刚石微结构阵列,测得其表面可承受电子束轰击的最大功率密度为12 W/mm~2。该阵列将可用于制备微阵列阳极X射线源,为实现X射线大视场相衬成像提供关键的光源器件。
Femtosecond laser processing is a cold-working technique that overcomes the effects of thermal effects, making the edges of the machined material very neat and accurate, with significant advantages for microfabrication of high-melting and hard-brittle materials. In order to prepare an X-ray source micro-structure array anode composed of a metal target and a diamond, a femtosecond laser processing technology is proposed to process the diamond micro-structure array. The experimental process parameters of the femtosecond pulse laser processing polycrystalline diamond material are emphatically studied. The effects of laser focusing lens, laser pulse energy and number of repeated scanning on the morphology and size of diamond microstructure were analyzed. The processing parameters were obtained according to the fabrication requirements. The groove width of 20μm and groove depth of 45μm High-quality polycrystalline diamond microstructure array, measured its surface can withstand electron beam bombardment maximum power density of 12 W / mm ~ 2. The array will be used to prepare microarray anode X-ray source and provide the key light source device for X-ray large field phase contrast imaging.