纳米晶TiO2 薄膜在光电变色器件中具有很重要的作用。它的微结构直接影响染料的吸附、光的散射以及电荷输运的特性。因此 ,探索TiO2 薄膜的微结构 (如粒径、表面形貌和厚度等 )及光电性能是非常有意义的。采用电子束蒸发工艺制备了光电变色器件用纳晶TiO2 薄膜 ,利用原子力显微镜、X射线衍射、俄歇电子能谱等手段对纳米晶TiO2 薄膜的表面形貌、结晶状态及组分进行了分析。从理论上研究和讨论了纳米晶TiO2 薄膜晶粒尺寸对光电性能的影响 ,并用量子限制效应解释了吸收光谱峰值波长随粒径减小而发生蓝移的现象 Nanocrystalline TiO2 thin films play an important role in the photochromic devices. Its microstructure directly affects dye adsorption, light scattering, and charge transport characteristics. Therefore, to explore the microstructure of TiO2 thin films (such as particle size, surface morphology and thickness) and the photoelectric properties is very significant. Nanocrystalline TiO2 thin films were prepared by electron beam evaporation. The surface morphology, crystalline state and composition of nanocrystalline TiO2 thin films were analyzed by atomic force microscopy, X-ray diffraction and Auger electron spectroscopy. The influence of the grain size of nanocrystalline TiO2 film on the photoelectric properties was theoretically studied and discussed. The phenomenon that the peak wavelength of the absorption spectrum shifted blue with the reduction of the particle size was explained by the quantum confinement effect