介绍了压痕测试法的最新发展,指出了确定超薄薄膜t<10 nm及很硬的薄膜t<100 nm的硬度及模量是对计量学中纳米范围的挑战.以压痕测试法替代显微维氏实验可显著地降低测量不确定度及实现自动化.压痕测试法在纳米范围及显微范围内可为微电子学、微电机械系统、技术光学等领域采用. The recent development of indentation testing is introduced, pointing out that the determination of the hardness and modulus at t <10 nm for very thin films at t <10 nm and very hard films at t <100 nm is a challenge to the nanometer range in metrology. Micro-Vickers experiments can significantly reduce the measurement uncertainty and automation. Indentation test method in the nano-range and microscopic range of micro-electronics, micro-electromechanical systems, optics and other fields used.