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首先从理论上推导了硅微陀螺仪谐振频率、品质因数、敏感信号输出及机械热噪声与温度之间的关系,进而说明了温度对陀螺仪零偏输出影响是各非线性因素综合作用的结果.然后,通过部分温度特性试验获得了硅微陀螺仪的模态谐振频率和品质因数随温度变化关系曲线.最后,根据实测零偏试验数据给出了分段多项式温度补偿方法,并进一步结合恒温控制方法改善补偿一致性效果,从而保证硅微陀螺仪硅结构体及其驱动检测电路不受外界温度变化的影响.结果表明,温补和温控技术相结合对提高陀螺仪的零偏稳定性有显著效果.
Firstly, the relationship between resonant frequency, quality factor, sensitive signal output and mechanical thermal noise of silicon micro-gyroscope and temperature is derived theoretically, and then the effect of temperature on the output bias of gyroscope is the result of the combination of nonlinear factors Then, the curve of modal resonance frequency and quality factor of silicon micro-gyroscope with temperature is obtained through partial temperature characteristic test.Finally, according to the measured zero-deviation test data, a piecewise polynomial temperature compensation method is given and further combined with constant temperature Control method to improve the compensation consistency effect, so as to ensure the silicon micro-gyroscope silicon structure and its driving detection circuit from the outside temperature changes.The results show that the combination of temperature compensation and temperature control to improve the gyro bias stability Have a significant effect.