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本文介绍了在国产LT-1离子探针上作的有关中性粒子束的实验工作。描述了中性粒子束密度的测量方法。利用中性粒子束分析导体、半导体和绝缘体,并和负离子分析绝缘体的情况进行对比。总的来看,中性粒子束分析绝缘体的灵敏度很低,在一次离子束中有中性粒子存在时,对质量分辨和微区分析都非常不利。这就说明一次离子束应该加装一个离子束的纯化装置,把包括中性粒子在内的所有杂质粒子都过滤掉,这对离子探针的分析将是很重要的。
This article describes the experimental work done on the domestic LT-1 ion probe on the neutral particle beam. Describes a method of measuring the density of the neutral particle beam. Neutral particle beam analysis of conductors, semiconductors and insulators, and anion analysis of insulators for comparison. In general, the sensitivity of neutral particle beam analysis insulators is very low, and in the presence of neutral particles in a primary ion beam, it is very detrimental to mass resolution and microanalysis. This shows that once the ion beam should be equipped with an ion beam purification device, including all the impurities, including neutral particles are filtered out, the ion probe analysis will be very important.