引言 粒子加速器、空间技术、电子工业等广阔的科技生产领域对无油超高真空的要求,推动了无油真空系统的研制和发展,它的使用已日趋普遍。作为无油真空系统的主泵溅射离子泵受到了更多的注意。我们在六七年试制40e/S普通二极泵的基础上,一年来又设计和投产了10e/S、25e/S、50e/ INTRODUCTION The requirements for oil-free ultrahigh vacuum in the vast fields of science and technology such as particle accelerator, space technology and electronics industry promote the development and development of oil-free vacuum system, and its use has become more and more widespread. As an oil-free vacuum system, the main pump sputter ion pump has received more attention. On the basis of trial production of 40e / S ordinary diode pump in the year and a half, we designed and put into production the 10e / S, 25e / S, 50e /