TiNi shape memory alloy thin films were deposited by using a RF magnetron sputtering apparatus. The transformation and shape memory characteristics of the thin films have been investigated by using DSC and tensile tests. After aging, perfect shape memory effect and superelasticity were achieved in TiNi thin films. The transformation and shape memory characteristics of the thin films have been investigated by using DSC and tensile tests. After aging, perfect shape memory effect and superelasticity were achieved in TiNi thin Films.