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为了克服现有方法在表面粗糙度测量范围和抗震动等方面的不足，分析了最近发展起来的几种动态表面粗糙度测量方法的优缺点，提出采用被测表面激光反射图的暗区比来实现运动表面粗糙度的实时测量。该方法的测量范围可达３０倍跨度，即可测量的表面粗糙度为０．０５μｍ到１．６μｍ或０．４μｍ到１２．５μｍ。分析了试样的运动速度和初试平均光强对暗区比的影响，该方法的测量结果与Ｔｅｌｙｅｒ－ｓｏｆｔ表面形貌测量仪的测量结果很吻合。
In order to overcome the deficiencies of the existing methods in the measurement range of surface roughness and anti-vibration, the advantages and disadvantages of several recent methods of dynamic surface roughness measurement are analyzed. It is proposed to adopt the dark region ratio of the measured laser surface reflectance Achieve real-time measurement of the roughness of the moving surface. The measurement range of this method can be up to 30 times the span, that is measurable surface roughness of 0.05μm to 1.6μm or 0.4μm to 12.5μm. The influence of the moving speed of the sample and the average light intensity of the first test on the dark zone ratio was analyzed. The measurement results of this method are in good agreement with those of the Telyer-soft surface profilometer.