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采用多靶磁控溅射技术,根据不同Mo靶功率制备一系列不同Mo含量的TaMoN复合膜。利用X射线衍射仪、纳米压痕仪、高温摩擦磨损仪、扫描电子显微镜及其配套的能谱仪研究复合膜的相组成、力学性能、室温和高温下的摩擦性能。结果表明,TaMoN复合膜的微结构是由面心立方、密排六方与底心斜方组成的多相结构;TaMoN复合膜的硬度比TaN单层膜的硬度高,且随着Mo含量的增加先升高后降低,在Mo含量为52.68 at%时达到最大值,为33.9 GPa;Mo元素的添加可以有效改善TaN薄膜在常温和高温下的摩擦性能,通过对磨痕的分析,详细解释了TaMoN复合膜具有优异的减摩性能的原因。
A multi-target magnetron sputtering technique was used to prepare a series of TaMoN composite films with different Mo contents according to different Mo target powers. The phase composition, mechanical properties, friction properties at room temperature and high temperature of the composite films were investigated by X-ray diffraction, nanoindentation, high temperature friction and wear tester, scanning electron microscopy and their spectrometers. The results show that the microstructure of TaMoN composite film is a multi-phase structure composed of face-centered cubic, hexagonal close-packed and rhombic center. TaMoN composite film has higher hardness than the TaN monolayer film. With the increase of Mo content First increased and then decreased, reaching a maximum value of 33.9 GPa at a Mo content of 52.68 at%. The addition of Mo element can effectively improve the tribological properties of TaN films at normal temperature and high temperature. TaMoN composite film has excellent anti-friction performance reasons.