A micromachined electrostatically suspended gyroscope(MESG)based on UV-LIGA microfabrication process was introduced.By close-loop control,the suspended rotor is
As the geometric center of circular grating does not coincide with the rotation center,the angle measurement error of circular grating is analyzed. Based on the moire fringe equations in decentration
To optimize the design and improve the performance of wastewater treatment bioreactors,the review concerning the hydrodynamics explored by theoretical equations