Silver nanoparticles (AgNPs) with well-distributed sizes were prepared by magnetron sputtering on slides and crystalline silicon (c-Si) solar cell following by annealing at different temperatures.The morphologies,optical and photovoltaic performance were investigated in detail.The spectroscopic result shows that two resonance peaks resulting from coupling effect among neighboring particles are difficult to obtain by other chemical methods.The photovoltaic performances reveal that the solar cells decorated with AgNPs significantly are degraded,including a maximal decrease of 20.4 ％ in short-circuit density and 53.9 ％ in energy conversion efficiency.The lowest efficiency achieved is 5.85 ％ for c-Si solar cells with AgNPs annealed at 500 ℃.The deterioration should result from the synergetic effect of the intrinsic absorption of single particle and coupling absorption between neighboring particles.