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采用多弧离子镀膜技术在硬质合金基体表面沉积TiN涂层,研究了气体总流量对TiN涂层表面形貌和力学性能的影响。通过SEM观察涂层表面形貌,利用ImageJ图像处理软件对涂层的像素分布进行统计和分析,并通过自动划痕仪和纳米压痕仪对涂层的力学性能进行表征。结果表明,随着气体总流量的增加,涂层表面大颗粒的数量和尺寸均在增加,涂层附着力先增大后减小,而显微硬度先减小后增大;当气体总流量为300mL/min时,涂层气坑数量最多,附着力最大,为106.4N;当气体总流量为100mL/min时,涂层显微硬度最大,为HV3 021。
TiN coating was deposited on the cemented carbide substrate by multi-arc ion plating technique. The effect of total gas flow on the surface morphology and mechanical properties of TiN coating was studied. The surface morphology of the coating was observed by SEM. The image distribution of the coating was calculated by ImageJ image processing software. The mechanical properties of the coating were characterized by automatic scratch tester and nanoindenter. The results show that with the increase of the total gas flow, the number and size of large particles on the coating surface increase, the coating adhesion first increases and then decreases, but the microhardness first decreases and then increases. When the total gas flow At 300 mL / min, the number of coating pits was the highest and the adhesion was the highest, which was 106.4N. When the total gas flow rate was 100 mL / min, the coating had the highest hardness of HV3 021.