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光固化是光束与光敏树脂之间的光化学反应,其作用过程对光固化加工分辨率有着直接影响。基于光子输运理论,利用蒙特卡罗方法追踪光子在树脂中的运动轨迹,对曝光光束入射、传输过程进行抽样,建立了微细光束固化模型;利用遗传算法并结合光固化实验重构获得了树脂材料的光学参数;利用该固化模型,模拟计算了微细会聚紫外光束(λ=365nm)单点曝光固化过程和固化单元点的形状和大小,分析了不同曝光量对固化结果的影响规律,计算结果与实验结果一致。研究表明,该模型可以有效地对微细光束与光敏树脂作用的复杂过程进行仿真,并能对不同入射光和曝光工艺条件下的固化物进行模拟计算,为微细光固化机理的研究和工艺优化提供了基础。
Light curing is a photochemical reaction between a light beam and a photosensitive resin, and its action has a direct effect on the resolution of the light curing process. Based on photon transport theory, Monte Carlo method was used to track the movement of photons in the resin and the exposure and transmission of the exposure beam were sampled. A micro-beam curing model was established. By using genetic algorithm and light curing experiment, the resin And the optical parameters of the cured material. The curing model was used to simulate the single-point exposure curing process and the shape and size of the curing unit. The influence of different exposures on the curing results was analyzed. The calculation results Consistent with the experimental results. The results show that this model can effectively simulate the complex process of the action of the micro-beam and the photosensitive resin, and can simulate the cured material under different incident light and exposure conditions to provide the research and optimization of the micro-light curing mechanism The foundation.