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针对大尺寸试件的圆柱度误差的超精测量时仪器的测量基准的误差分离问题,提出了一种可分离出基准间的平行度误差以及直行基准的直线度误差的方法,即反向法误差分离技术。利用该方法建立的两截面及多截面误差分离模型已用于重要试件圆柱度误差的超精测量中,误差分离结果的不确定度为0.22μm。该技术对超精密车床的误差检定亦有很好的指导意义
Aiming at the problem of error separation of the measuring datum of hyper-precision measurement of large-scale specimen, a method of separating the parallelism error between datums and the straightness error of straight-ahead datum is proposed, that is, Error separation technology. The two-section and multi-section error separation models established by this method have been used in the hyperfine measurement of the cylindricity errors of the important specimens. The uncertainty of the error separation results is 0.22μm. The technology of ultra-precision lathe error test also has a good guiding significance