An echelle diffraction grating based high-resolution spectrometer-on-chip on silicon oxynitride (SiON) waveguide platform operated at a wavelength range of 850 nm is demonstrated. The chip comprises 120 output waveguides with 0.25-nm wavelength channel spacing and has a size of only 11 × 6 (mm). The experimental results show that the insertion loss is-14 dB, the measured adjacent channel crosstalk is less than -25 dB, the 3 dB channel bandwidth is < 0.1 nm, and the channel non-uniformity is 3 dB for 56 channels with a wavelength ranging from 838 to 852 nm. An echelle diffraction grating based high-resolution spectrometer-on-chip on silicon oxynitride (SiON) waveguide platform operated at a wavelength range of 850 nm is demonstrated. The chip comprises 120 output waveguides with 0.25-nm wavelength channel spacing and has a size of only 11 × 6 (mm). The experimental results show that the insertion loss is -14 dB, the measured adjacent channel crosstalk is less than -25 dB, the 3 dB channel bandwidth is <0.1 nm, and the channel non-uniformity is 3 dB for 56 channels with a wavelength ranging from 838 to 852 nm.