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本文介绍作为真空控制传感器的智能冷阴极规管超高真空计。它是根据我室光束线和实验站真空监测、控制和联锁保护功能的特殊要求研制的。真空测量范围为5X10－1～5X10－8Pa。采用单片机Intel8031，设备结构简单，使用方便，运行可靠，功能可以扩充。
This article describes a smart cold cathode gauge ultra-high vacuum gauge as a vacuum control sensor. It is based on my room beam line and experimental station vacuum monitoring, control and interlock protection features developed by the special requirements. Vacuum measurement range of 5X10-1 ~ 5X10-8Pa. Using single-chip Intel8031, device structure is simple, easy to use, reliable operation, the function can be expanded.