研制成功了一台使用光学偏转法检测的原子力显微镜，通过对云母、光栅、光盘等样品的观测证明仪器达到原子分辨率，最大扫描范围可达７μｍ×７μｍ。文中将对这台原子力显微镜的原理、结构及一些应用结果进行讨论。 An atomic force microscope with optical deflection method was successfully developed. The observation of samples such as mica, grating and optical disk proves that the instrument achieves atomic resolution and the maximum scanning range can reach 7μm × 7μm. The article will be the atomic force microscope principle, structure and some application results are discussed.