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X射线双晶衍射仪系统中受参考晶体分辨率等因素的影响,X射线的相干长度不超过1μm。X射线在异质外延晶体材料内衍射时,不超过相干长度范围内厚度外延层中的衍射波会产生相干叠加,否则,产生非相干叠加。分子束外延(MBE)生长了短周期InGaAs/GaAs超晶格,在其摇摆曲线中观察到显示X射线在超晶格结构中衍射相干特征的多级卫星峰及Pendell song干涉条纹,并利用相干光理论对超晶格结构信息诸如周期及“0”级峰位置等进行了分析。
X-ray double crystal diffraction system by the reference crystal resolution and other factors, the coherence of X-ray length does not exceed 1μm. When X-ray diffraction in heteroepitaxy crystal material, the diffracted waves in the thickness epitaxial layer do not exceed the coherence length to generate coherent superposition, otherwise, non-coherent superposition occurs. In MBE, short-period InGaAs / GaAs superlattices were grown. In their rocking curves, multi-level satellite peaks and Pendell song interference fringes with X-ray diffraction coherence in the superlattice structure were observed. Light theory analyzes superlattice structure information such as period and “0 ” peak position.