基于MEMS加工技术,提出了一种加热、传感电极和反应腔室可分离的PCR芯片结构,加热、传感电极采用Pt薄膜材料并可重复使用,反应腔室采用PDMS材料,芯片的制造成本大为降低。利用COMSOL软件对设计的PCR芯片进行了温度场仿真分析,并用红外热像测温仪(NEC R300)对微制造的芯片温度场分布进行了测量。测量结果表明芯片结构能得到较好的温度均匀性,为后续PCR芯片扩增实验提供了可靠的依据。 Based on the MEMS processing technology, a PCR chip structure with heating, sensing electrode and reaction chamber separable is proposed. The heating and sensing electrodes are made of Pt thin film material and can be reused. The reaction chamber adopts PDMS material, the manufacturing cost of the chip Greatly reduced. The COMSOL software was used to simulate the temperature field of the designed PCR chip, and the temperature field distribution of the microfabricated chip was measured by infrared thermography thermometer (NEC R300). The measurement results show that the chip structure can get better temperature uniformity, which provides a reliable basis for subsequent PCR chip amplification experiments.