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采用磁控溅射技术,在高速钢基材上沉积了不同Y含量的CrAlYN涂层,进行了900℃下1 h高温氧化试验。通过SEM、EDS、XRD和纳米压痕仪等对涂层元素组成、纳米硬度、弹性模量以及热处理前后的表面形貌和物相组成进行了表征。研究了Y含量对CrAlYN涂层硬度,弹性模量、物相组成和高温抗氧化性能的影响。结果表明:加入Y后涂层没有新的物相形成,但是CrAlN相的衍射峰取向由(200)向(111)转变。与不添加Y的CrAlN涂层相比,Y含量0.41 at%时,涂层的硬度、弹性模量和900℃高温抗氧化性能显著改善。Y含量2.75 at%和3.94 at%时,涂层的综合性能降低。
The CrAlYN coating with different Y content was deposited on the high speed steel substrate by magnetron sputtering. The high temperature oxidation test was carried out at 900 ℃ for 1 h. The elemental composition, nanohardness, elastic modulus, surface morphology and phase composition before and after heat treatment were characterized by SEM, EDS, XRD and nanoindentation. The effects of Y content on the hardness, elastic modulus, phase composition and high temperature oxidation resistance of CrAlYN coatings were investigated. The results show that there is no new phase in the coating after adding Y, but the diffraction peak orientation of CrAlN phase changes from (200) to (111). Compared with CrAlN without Y, the hardness, elastic modulus and high temperature oxidation resistance at 900 ℃ of Y content of 0.41 at% were significantly improved. When the Y content is 2.75 at% and 3.94 at%, the overall performance of the coating decreases.