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本文讨论了用AES分析SnO_x超微粒子薄膜表面的有关问题。观察分析了成分和导电性不同的样品经离子束轰击清洗表面后,在AES的探针电子束连续轰击下,表面俄歇信号的峰形变化。利用SEM观察比较了离子束和电子束轰击区域和非轰击区域的图像。并与热退火样品作了对比。结果显示,轰击区域超微粒子薄膜的表面形貌变化很大,平均粒径显著增加。
This article discusses the use of AES to analyze the surface of SnO_x ultrafine particle films. The change of the peak shape of surface Auger signal under the continuous bombardment of AES probe electron beam was observed and analyzed after the ion beam bombarded the surface of the sample with different composition and conductivity. The images of ion beam and electron beam bombardment and non-bombardment regions were compared and observed by SEM. And compared with the thermal annealed samples. The results show that the surface morphology of the ultrafine particles in the bombarded region varies greatly and the average particle diameter increases significantly.