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基于微机械谐振器的硅振荡器是微波通信系统中的关键器件。制作了工作于径向体声学振动模态的微机械谐振器,通过分析微机械谐振器的电参数,并以此谐振器为基础进行振荡器的设计。针对圆盘形微机械谐振器工作过程中阻抗较大的问题,通过多级放大来补偿信号经过谐振器时引起的衰减和相位变化。振荡器包括两部分放大电路,基本振荡回路的多级放大保证振荡器正常起振,输出多级放大保证振荡器的输出达到一定的功率。所设计的振荡器阻抗44kΩ,振荡频率143.33MHz,为大阻抗条件下振荡器的设计提供一定的参考。
Silicon oscillators based on micromechanical resonators are the key components in microwave communication systems. A micromechanical resonator working in the radial bulk acoustic vibration mode was fabricated. By analyzing the electrical parameters of the micromechanical resonator, the resonator was designed based on the resonator. Aiming at the problem of larger impedances in the working process of disc-shaped micromechanical resonators, the attenuation and phase changes caused by the signals passing through the resonators are compensated by multistage amplification. Oscillator consists of two parts of the amplifier circuit, the basic oscillation circuit multi-stage amplification to ensure the normal oscillator start-up, multi-stage output amplification to ensure that the output of the oscillator to achieve a certain power. The designed oscillator has an impedance of 44kΩ and an oscillation frequency of 143.33MHz, which provides a reference for the design of the oscillator under the condition of large impedance.