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新型磁控溅射电阻镀膜机是在同一台设备上能制作出中、低和高阻值金属膜电阻的专用设备。文章主要是对它的结构及设计核心部分进行了论述,并将研制中的一些数据和关键部分予以阐明。
The new magnetron sputtering resistance coating machine is in the same equipment can produce medium and low resistance and high resistance metal film special equipment. The article mainly discusses the core part of its structure and design, and clarifies some of the data and key parts of the research.