由于研磨阶段非球面的面形误差将由几十微米收敛到几个微米,因此采用高重复精度的离散测量技术是决定误差收敛效率、影响加工进程的关键。在新一代数控光学加工中心(FSGJ Ⅱ)上,设计了双测头对非球面进行面形定量检测的轮廓测量机构。通过对测头运动导轨在x、z方向的直线精度的分析,建立了导轨直线度误差补偿模型,以较低的成本实现了较高的测量精度。 Since the aspheric surface area error of the grinding stage will converge from several tens of micrometers to several micrometers, the discrete measurement technique with high repetition accuracy is the key factor that determines the error convergence efficiency and affects the machining process. In the new generation of CNC optical machining center (FSGJ Ⅱ), a profile measuring mechanism for double-probe aspheric surface area quantitative detection was designed. Through the analysis of the linear accuracy of the probe movement in the x and z directions, the compensation model of the straightness error of the guide rail is established, which achieves a higher measurement precision with lower cost.