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FP标准具和干涉仪利用多光束干涉的原理,产生极锐的干涉条纹并且谐振频率对FP腔长的变化非常敏感,根据这些特点,从利用FP干涉仪进行激光器的频率锁定、稳频,光学倍程精密定位和纳米测量三个角度综述了在长度测量领域FP干涉仪的发展情况;在分析主要存在的问题和解决方法的基础上,讨论了FP干涉仪的发展方向,并指出在纳米测量中FP干涉仪将起到越来越重要的作用。
F P etalon and interferometer using the principle of multi-beam interference to produce extremely sharp interference fringes and resonant frequency of PP cavity length is very sensitive to changes in these characteristics, from the use of FP interferometer laser frequency This paper summarizes the development of FP interferometer in the field of length measurement from three perspectives, namely, locking, frequency stabilization, optical double-precision positioning and nanometer measurement. Based on the analysis of the main problems and solutions, the FP interference Instrument development direction, and pointed out that in the measurement of F-P interferometer will play an increasingly important role.