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1 IntroductionIthasbeenalonghistoryfortheMEMSindus trytodeveloptotoday’sscale .MEMS (microelec tromechanicalsystem )beganin 196 0safterthere searchersinWestinghouseLaboratoriescreatedthe”resonantgate”transistorbyetchingawaymaterialtoreleaseametalbeamw
1 Introduction IthasbeenalonghistoryfortheMEMSindustrytodeveloptotoday’sscale .MEMS (microelec tromechanicalsystem) beganin 196 0saftertheresearchersinWestinghouseLaboratoriescreatedthe “resonantgate” transistorbyetchingawaymaterialtoreleaseametalbeamw